Used ULVAC Ei-5K #293604475 for sale

ULVAC Ei-5K sputtering equipment is a high-performance, multi-functional system used for depositing thin films on a variety of materials including metal, semiconductor, and ceramic substrates. It is primarily used in the production of flat panel displays and solar cells, as well as in the production of various other electronic devices. ULVAC EI 5 K was designed to provide increased auto-sputtering of thin films, while also delivering improved levels of substrate and film uniformity, excellent adhesion properties, low contamination levels, and shorter processing times. Ei-5K features a 5-Kilowatt, Medium Frequency (MF) DC magnetron power supply, allowing it to sputter a wide range of metals and other materials. It is equipped with two cathode targets and has four process chambers, including a pre-treatment chamber, a deposition chamber, and two calorizing chambers. The unit is capable of processing substrates up to 6.7 inches (17 cm) in size, with a processing speed of up to 40 wafers per hour, or a single wafer of up to 13 inches (33 cm). EI 5 K is automated, featuring an LCD touchscreen operator control and built-in safety interlocks, programmable sequence control, process control software, and automatic and manual control modes. It also includes a vacuum chamber for degassing substrates, an automatic and intuitive sample loading/unloading machine, and a range of optional accessories. Its advanced feature set allows for easy integration into existing production lines. ULVAC Ei-5K is known for its excellent levels of precision and repeatability, giving it consistent and accurate results even with low levels of process control. Its low particle count, low-profile design, and reduced power consumption, make it an energy-efficient choice that is easy to install. This tool is also compatible with various gases, allowing for additional flexibility in production requirements. Overall, ULVAC EI 5 K sputtering asset is an effective, versatile, and easy to use tool for deposition of thin films to a range of substrates, making it suitable for a variety of applications. It provides a fast, low-cost solution that is safe, reliable, and cost-effective, making it an ideal choice for commercial and industrial applications.