Used ULVAC Ei-5K #293607249 for sale

Manufacturer
ULVAC
Model
Ei-5K
ID: 293607249
Vintage: 2007
E-Beam evaporator 2007 vintage.
ULVAC Ei-5K is a highly versatile sputtering equipment manufactured by ULVAC, Inc. It is a magnetic sputter deposition tool and utilizes a low-vacuum, sputtering process to coat substrates or other materials with thin films. ULVAC EI 5 K has a 5" magnetic sector target with a width of 9" for greater versatility. This sputtering system is designed to provide maximum process efficiency and reproducibility. Ei-5K has a very fast response time from target gap to pressure rise, allowing for quick start-up and repeatability. In addition, the unit has very low-power consumption and a built-in O-ring sealing unit for effective process control. The machine also features a multi-point, stepper motor for accurate target-to-substrate positioning. The advanced features of EI 5 K, such as a state-of-the-art direct diode plasma, make it perfect for a range of applications. Its excellent masking and shadowing accuracy is perfect for various advanced thin-film deposition processes such as film coatings, super-lattices, complex thin-film structures and PVD processes. In addition to its outstanding accuracy, the tool also offers very high-level process control, making it great for precision deposition of high-quality thin films. ULVAC Ei-5K also features a two-station wafer load-lock chamber for high-throughput applications and flexible automation options to suit any requirement. Overall, ULVAC EI 5 K is a powerful, accurate and efficient deposition tool, capable of a variety of processes. Its excellent accuracy, low power consumption and powerful, tightly-controlled process make it ideal for a range of thin-film deposition processes and high-throughput applications.
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