Used ULVAC Ei-5K #9248803 for sale

ULVAC Ei-5K is a single-target metal sputtering equipment that is used for semiconductor fabrication and aerospace applications. The system is an ultra-high vacuum sputtering technology that offers very high levels of process control. It features a large 4.5- by 6-inch sputtering target and two 5-inch sputtering heads that can accommodate a variety of process requests. The unit uses ULVAC patented ULVAC EI 5 K magnetron source for maximum ionization of the sputtering material and optimum target power. This increases ion bombardment of the target, resulting in improved material deposition uniformity. The machine's high power level also ensures that high deposition rates and a more efficient sputtering process can be achieved. Ei-5K features a fully directional ion source that can be tailored to match the shape of the target material. This is combined with an advanced optical emission spectroscopy (OES) tool that provides monitoring of deposition and allows for advanced process control. The asset is also equipped with a gas delivery model that can optimize the process environment for high quality deposition. The equipment is multifunctional and can deposit metals such as aluminum, copper, chrome, and tungsten. It can also be used to deposit thin films for dielectric and anti-reflective coating applications. Additionally, the sputtering system is highly versatile and can accommodate a variety of techniques such as composition control, gradient sputtering, and reactive sputtering. EI 5 K is designed with a high-performance coating delivery unit that provides excellent deposition uniformity and repeatability. It also features a substrate holder with a temperature range of -20C to +150C. This allows for temperature control of the substrate during the coating process, which helps to ensure high-quality material deposition. Overall, ULVAC Ei-5K offers a cost-effective solution for metal sputtering applications that demand consistent results. The combination of advanced technology and high-precision processes provides reliable results while ensuring low operating costs. With its many features this sputtering machine is well-suited to a variety of applications and provides a reliable and efficient coating tool.