Used ULVAC Ei-5K #9248804 for sale

ULVAC Ei-5K is a sputtering equipment designed for the deposition of thin layers of material on the sample surface. It is suitable for a wide variety of applications, including flat panel displays, optoelectronics, solar cells, and disk drives. ULVAC EI 5 K is capable of handling wafers up to 200 mm in diameter and has an integrated ion cleaning station. The sputtering system has a ULVAC DR-100 diode-type sputtering source, which includes four cathodes for deposition of four different materials simultaneously. An adjustable stage allows for precise control of the spark distance between the substrate and the cathode, ensuring consistent layer thickness deposition. Ei-5K also features a Digital Substrate Temperature Sensor (DSTS). This high-precision temperature sensor allows accurate monitoring of the deposition temperature on the substrate. In addition to the sputtering unit, EI 5 K has an ancillary section that includes an ion source and ion cleaning rack. The ion source is composed of an ion gun and integrated ion source adapter, which allows for precise control of both uniformity and repeatability of the sputtered layer. The integrated Ion Cleaning Rack ensures uniformity in the sputtered layer uniformity by removing particles and surface contaminants. ULVAC Ei-5K is an easy to use machine, with an intuitive software package for controlling and monitoring the deposition process. The software also includes a graphical interface for viewing the deposition in real-time, allowing for more precise adjustment of deposition parameters if necessary. ULVAC EI 5 K can be run in either manual or Automated Job-Control Mode, and also has an Endpoint Monitor which provides real-time feedback on the progress of the deposition process. The Automated Job-Control Mode is particularly useful for large deposition runs, as it allows the user to configure a deposition job with the parameters and then let the tool run autonomously until the job is completed. Overall, Ei-5K is a high-performance sputtering asset that is ideal for a range of applications, from flat panel displays to optoelectronics and solar cells. It is user-friendly and provides a reliable platform for the deposition of thin layers of material on the sample surface.