Used ULVAC Ei-5K #9364552 for sale

ULVAC Ei-5K is a high-performance sputtering equipment designed for hard coating applications. It is one of the latest developments of ULVAC product line. The system features a gas management unit for easy control of sputtering sources, as well as an advanced dynamic vacuum design for precise pressure control. The machine offers both DC and RF sputtering with a 1-2 kW power source, allowing for excellent film uniformity and high deposition rates. ULVAC EI 5 K also features a powerful substrate clamping tool for maximum process stability and reliable results. Ei-5K features an eight-target load lock chamber with a combined Cool Torch and process chamber. The chamber is suited for handling a wide range of substrates, including large panels, up to 610 mm. and cylindrical objects. It has a target load capacity of up to eight targets and a dual gas box asset. EI 5 K has a unique support model to handle multiple deposition processes with different magnets and other elements. For superior process control, ULVAC Ei-5K offers a helium leak detector for detecting gas leaks, as well as a state-of-the-art equipment for monitoring and controlling substrate temperature. It also features a multi-segment power control system to enable precise film deposition of a variety of materials. ULVAC EI 5 K also features a digital data acquisition unit, which allows for remote control and data logging by a computer or PLC. Ei-5K is an excellent choice for a variety of hard coating applications, such as coating for ceramic parts, medical devices, and ITO thin film applications. It is also suited for deposition of Magnetron and Plasma Assisted Chemical Vapour Deposition (PACVD) processes. The machine offers remarkable uniformity and stability of the target-substrate distance, limited substrate heating, and excellent temperature control. To ensure reliable and superior results, EI 5 K offers a variety of automatic features, such as auto-cleaning, auto-venting, auto-breakdown, and auto-locking. ULVAC Ei-5K is an ideal choice for those who strive for high-performance hard coating applications.