Used ULVAC EI-7K #293587277 for sale

ULVAC EI-7K is a sputtering equipment used for thin-film deposition of materials. It is manufactured by ULVAC Technologies, Inc., a company specializing in vacuum technology, and utilizes its own innovative process, the EI technology (mentioned below). This system is designed for high-efficiency deposition, and can be used with a variety of targets, including those composed of oxide, nitride, oxynitride, metals and alloys, and silicides. The EI technology utilizes a dedicated ion source which ionizes the sputtering gas within the chamber. This facilitates high ion density with tight control of energy, energy spread and incident angle, resulting in a uniform, efficient deposition process that is suitable for a wide range of materials. Other features include two electron multipliers for improved process control and rate optimization. In addition, the unit is equipped with two small monitors that display the sputter position and process time, improving process management. ULVAC EI 7 K has a 7-inch double (dual) rotary sputtering chamber with a minimum chamber pressure of 5x10-5 Pa. It is equipped with a separate gas box and gas line, enabling efficient gas utilization. The machine supports five types of targets: high- and low-resistance targets; COG, sputter and refill targets; and PCD (pulse control distortion) targets. For efficient film deposition, the chamber is also equipped with a powerful magnetic field generator which can control the direction of the magnetic field. For precise control of the ion source parameters, RF (radio frequency) plasma is available. EI-7K also has a maximum wafer size and temperature of 300mm and 400°C, respectively. Ultimately, EI 7 K sputtering tool is an excellent choice for high-efficiency deposition of different materials. It is efficient, accurate and highly flexible. It comes with an array of features specifically designed to make film deposition easier and more precise. For these reasons, it is an excellent choice for use in a wide variety of industries.