Used ULVAC EI-7K #9402605 for sale

ULVAC EI-7K is a multiple source, medium-power sputtering equipment designed for research and development (R&D). The system combines the convenience of a compact design with the flexibility of multi-source sputtering capabilities. ULVAC EI 7 K can accommodate up to four cathodes, each capable of either RF or DC sputtering, as well as a fifth cathode for e-beam evaporation. The unit supports many different substrate materials and is suitable for the production of thin films, multi-layered films, and other delicate electronic materials. EI-7K includes a robust vacuum machine, with a base pressure range of 10-7 to 10-2 Torr. The tool is designed with an ultra-low pressure and temperature pump-down cycle, allowing for fast and efficient evacuation of the chamber. An active turbomolecular pumping asset is provided for the pressure and temperature control, which allows for precise process conditions, and a precise and repeatable vacuum environment. EI 7 K features two load-lock chambers for quick access to the main chamber, allowing for rapid substrate replacement with no process interruption. The model can accommodate multiple substrate sizes, from small pieces to full wafers. ULVAC EI-7K also includes advanced digital controllers and monitors, a motorized top-plate, and a precise geometry-based turbo-molecular pump. The equipment is designed with an easy-to-use, software-configurable user interface, equipped with a variety of automation features. It provides flexible control capabilities and offers a range of gas flows and system configurations. ULVAC EI 7 K has multiple safety systems and is fully compatible with industry standards, providing a level of reliability and precision required for thin film production. EI-7K is an advanced sputtering unit, providing optimal solution for applications in industries such as displays, electronics, optoelectronics, and solar cells. It's the ideal machine for research laboratories and industrial production of thin film materials, providing the ability to develop and produce an array of high-quality thin films.