Used ULVAC ei-7L #9236127 for sale

ULVAC ei-7L
Manufacturer
ULVAC
Model
ei-7L
ID: 9236127
Evaporator.
ULVAC ei-7L is a sputtering equipment produced by ULVAC Inc., a multinational company that specializes in Vacuum Science and Technology. ULVAC EI-7 L employs a magnetron sputtering process to deposit thin films onto a substrate like silicon wafers, quartz crystal, ceramic or glass. It utilizes high-frequency AC power supply to create a low-temperature plasma, which is then used to deposit thin films onto the substrate. This sputtering process can be performed with linear or rotary planar targets. Ei-7L has a maximum DC sputtering power up to 5kW and a maximum AC power of up to 3kW. It can operate in a wide range of chamber pressures from ultra-high vacuum to atmosphere. It features an interior chamber size that can fit a 4-inch wafer up to an 8-inch wafer. The process temperature can be maintained up to 400°C. It is also equipped with an automatic pressure control system that can monitor and adjust the pressure within the chamber and maintain it at the desired level. EI-7 L is built with a sophisticated robotic arm that can enable the substrate and targets to move and rotate freely within the chamber. It is widely used for the deposition of thin materials onto substrates such as metals, semiconductors, insulators, polymers, and others. The sputtering process can be used for a wide range of applications, including flat panel displays, solar cells, LED, and many more. ULVAC ei-7L features an advanced RF matching unit that matches the impedance between the power supply and the sputter chamber. It is also equipped with a sophisticated cooling machine that maintains the temperature of the chamber during the sputtering process. Its advanced control tool allows users to monitor and control the process parameters such as time, power, voltage, and pressure. ULVAC EI-7 L is a versatile sputtering asset capable of sputtering a wide range of materials and substrates. It has the ability to deposit thin films at high rate even with a small amount of material. With its high degree of compatibility and its sophisticated control systems, ei-7L is a great choice for creating reliable and high-quality thin films.
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