Used ULVAC Entron EX 300 #293592005 for sale
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ID: 293592005
Wafer Size: 12"
Vintage: 2012
Multi-chamber sputtering system, 12"
(8) Chambers
2012 vintage.
ULVAC Entron EX 300 is an industrial sputtering equipment used for a variety of material-coating applications. This system effectively deposits uniform thin films to substrates at high rate and low cost, making it suitable for high-volume production. As a multi-arc unit, it is capable of coating a wide range of materials, including dielectrics, metals, and alloys. Entron EX 300 is designed to deposit uniform thin films on substrates of various sizes, up to 450mm. The machine combines high production rates with precise control over film thickness, adhesion and optical characteristics. The Entron's geometry also allows for precise placement of multiple arcs and precise alignment of substrate position. ULVAC Entron EX 300 operates at low substrate temperatures, allowing for rapid evaporation of complex materials without thermal damage. Additionally, Entron EX 300 offers precise controlling of the deposition rate and uniformity to meet a wide range of customer requirements. When combined with an inert gas inert ion source and integrated vacuum tool, ULVAC Entron EX 300 is capable of precise sputtering at high speed and ultra-low pressure. Entron EX 300 includes several features to ensure superior performance. Software is provided for convenient and easy parameter setting, enabling a wide variety of set points while providing excellent repeatability. The multilayer process control options further increase the precision of the sputtering deposition and allow for consistent results. Moreover, the process control asset simplifies production and yields repeatable results from wafer to wafer. ULVAC Entron EX 300 is an ideal model for uniform and precise deposition of thin films. It offers producers an efficient and cost-effective way to produce large volumes of products with tight tolerances. With superior process control and advanced features, this ULVAC multi-arc sputtering equipment is suitable for a wide range of coating applications.
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