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Marketplace
Sputtering Systems
ULVAC
Entron EX 300
#293770989
Used ULVAC Entron EX 300 #293770989 for sale
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Sputtering Systems
Manufacturer
ULVAC
Model
Entron EX 300
Equipment Details
Reviews
ID:
293770989
Vintage:
2007
Sputtering system (8) Chambers (3) MPD Racks (3) Pallets Transfer module: Tandem core (FX & RX) Transfer robot Process module: FX: F1 F2 F3 F4 RX: R1 R2 R3 R4 EFEM Chiller Compressor Control monitor PC 2007 vintage.
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