Used ULVAC Entron EX W200S #9266623 for sale

ULVAC Entron EX W200S
ID: 9266623
Wafer Size: 8"
Vintage: 2006
Sputtering system, 8" SiO2, TiO2 2SP Chamber 2006 vintage.
ULVAC Entron EX W200S is a high-performance sputtering equipment designed for a wide range of applications. It is ideal for film deposition, etching, patterning, and other thin film applications. This system features an advanced turbomolecular pumping unit to deliver an excellent vacuum environment with excellent vacuum stability and reliability. Entron EX W200S uses a chamber with a 4-dimensional motion capability, which grants precise sample manipulation. It has a rotatable substrate stage as well as a tiltable sputter target by particular degrees, allowing users to deposit at a wide range of angles to enhance the deposition quality. The high precision of the motion is guaranteed with the base positioning controlled by non-contact, non-magnetic, non-commutative, laser-optical interferometer. ULVAC Entron EX W200S is compatible with a broad range of materials such as aluminum, nickel, chromium, titanium, zinc, gold, silver and alloys. It is able to control 6 magnetron sources with a pulsed power source, which can sputter an elemental material or a material with target material to increase thin film uniformity. Furthermore, the ion beam source helps to smooth the deposited thin film and increase the adhesion to the substrate. The sputtering process has been largely automated by the on-board process management software with an intuitive graphical user interface. It is capable of performing complex multi-step sputtering processes with reliable repeatability. This machine also has a wide range of process monitoring options, such as substrates temperature, pressure, current, voltage, etc. Lastly, the use of a real-time online interlock tool ensures a safe operation of the asset. In conclusion, Entron EX W200S is a powerful and precise sputtering model that provides users with dependable thin film deposition and etching results. It is perfect for any laboratories requiring a high reliability and excellent results.
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