Used ULVAC Entron EX W300 #9275306 for sale
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ID: 9275306
Wafer Size: 12"
Vintage: 2011
System, 12"
EFEM
MF
(2) PVD
PC
Parts and racks
2011 vintage
ULVAC Entron EX W300 is a high performance, compact sputtering equipment designed for material processing applications. The system offers enhanced productivity, reliability, and precision for deposition and precision coating applications. It features an advanced magnetron cathode that provides a uniform and consistent source of energy for even and uniform film deposition. ULVAC ENTRON-EX W300 is equipped with an in-situ substrate heating mechanism, a multi-zone load-lock chamber, and a rear-side ionization chamber to facilitate high film quality. ENTRON EX W 300 has an expansive sputter chamber that increases process throughput, allowing for increased substrate capacities with a step size of 4 inches. The unit employs a highly efficient two-stage cooling machine for the sputter cathode to ensure optimal cathode temperatures and long-term usage. The tool is equipped with a high-vacuum sputter gas source with connections to a vacuum pumps and a direct feed of sputter gas that exchanges between the chamber and the load-lock. Furthermore, the asset offers a low-pressure sputter process for deposition onto non-conductive substrates. For improved deposition quality, the model has a rotation table for substrates that allows for complex film architectures to be processed. It includes automatic substrate loading and unloading using a Peltier-can equipment and is outfitted with a multi-zone gas-purging system to maintain a clean environment within the unit and control the substrate-plasma interface. Additionally, ULVAC ENTRON EX W 300 is integrated with a propriety software package that provides remote control access to the machine, offering simple operation and process monitoring. ENTRON EX W300 provides superior film deposition and control for multiple sputter deposition applications and is built with durable materials, making it an agile yet robust sputtering tool. This sputtering asset is an ideal choice for industries including automotive, aerospace, electronics, biomedical, and optics.
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