Used ULVAC Entron EX W300 #9353969 for sale
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ID: 9353969
Wafer Size: 12"
Vintage: 2007
Sputtering system, 12"
Load module:
Load port
Robot arm
Transfer module: (2) Robot arms
Process module: (8) Chambers
Utility:
AC Rack
Pump rack
DC Power supply rack
Heater rack
2007 vintage.
ULVAC Entron EX W300 sputtering equipment is an advanced physical vapor deposition (PVD) system specifically optimized for the deposition of metals, alloys, dielectrics, and other materials onto substrates. The unit is ideal for creating thin films for a range of applications from solar cells to optoelectronic components. The machine configuration of ULVAC ENTRON-EX W300 includes a base unit with two independent vacuum chambers and a load-lock mechanism. This allows for simultaneous processing of up to two substrate sizes. The direct-drive motor drive is capable of providing precise and repeatable deposition of a variety of materials and surface finishes with consistently repeatable results. ENTRON EX W 300 is equipped with ULVAC field-proven "PowerWave" sputtering tool. This allows for the selective deposition of two different materials with independent power settings in a single deposition cycle. The asset is also equipped with four cathodes in each vacuum chamber, allowing for simultaneous sputtering of up to four materials. ENTRON-EX W300 is further equipped with a wide range of sample holders and jigs for accommodating different types of samples and substrates. These allow for precise and repeatable positioning of the substrates during the deposition process. This ensures the uniform coverage of the films over the entire surface. Entron EX W300 is also equipped with advanced control systems, including an integrated process control panel and an up-to-date PLC touch-screen controller. This allows for a user friendly, automated control of the entire sputtering process. Additionally, the model can be connected to a variety of other systems for data logging and operator guidance. Overall, ENTRON EX W300 is ideal for creating precise and high-quality thin films with a variety of materials. Its automated control, precise deposition, and advanced jig equipment allow for uniform coverage rates and repeatable sputtering of a various different materials in a single deposition cycle. ULVAC ENTRON EX W 300 is a reliable, cost-effective, and high-performance sputtering system that is ideal for a range of thin-film applications.
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