Used ULVAC Entron EX #9195690 for sale

ULVAC Entron EX is a sputtering equipment designed for applications of various advanced material thin films. It offers high-speed, high-precision and high-quality sputtering deposition with high reproducibility. ULVAC ENTRON-EX System consists of two components: an AC sputtering source and a DC sputtering source. The AC sputtering source is used for deposition of metals and inorganic compounds, as well as some oxide thin films. The DC sputtering source is used for deposition of a wide range of metals, alloys, and IC resistive films. The unit uses an all-in-one type of planar magnetron sputtering configuration that allows for two sputtering sources to be used simultaneously. This sputtering configuration allows for high-rate sputtering due to dual direction magnetron sputtering. The magnetic field generated by the magnets and the setup of the machine results in a high deposition rate on the target surface. The tool is also equipped with an auto-compensator which provided adjustment of the power source voltage according to the target area size. This feature helps prevent target surface contamination and increases the asset's productivity by reducing waste materials due to its automatic adjustment of power source voltage. Additionally, the model can be set to have different power source voltages according to the target material, which is helpful when depositing different thin films. This equipment offers a variety of features that increase the user experience when operating the platform. It is highly automation with real-time display of vacuum conditions, system status, and other important information. It also offers a variety of operation modes, allowing for a high degree of flexibility depending on the current requirements. Additionally, it has an inert gas supply unit which enables efficient sputtering process control when necessary. Overall, Entron EX is an innovative sputtering unit that provides efficient and reliable deposition of thin films for various applications. The high-precision and high-quality sputtering deposition, as well as the added features, make ENTRON-EX an ideal platform for depositing thin films.