Used ULVAC MLX-3000N #293796096 for sale

ULVAC MLX-3000N
Manufacturer
ULVAC
Model
MLX-3000N
ID: 293796096
Sputtering system.
ULVAC MLX-3000N Sputtering Equipment is a high-performance sputtering deposition system designed for precision deposition of thin films. It is an ideal choice for a variety of industrial, scientific, and semiconductor related applications. MLX-3000N utilizes high-power magnetron source technology to produce high quality thin films of various materials on large-area substrates. The unit is designed to provide very low temperature deposition via electron beam assisted sputtering technique. ULVAC MLX-3000N features a variety of advanced features, such as an ultra-high vacuum chamber, an advanced high-efficiency magnetron power source, and remote-controlled operation. The ultra-high vacuum chamber creates a clean vacuum environment to ensure a high deposition rate, while the high-efficiency magnetron power source with precision control enables exceptional film uniformity even on small substrates. Additionally, the remote-controlled operation allows for efficient and convenient sputter deposition. MLX-3000N's ultra-large size chamber allows for a wide range of applications, including copper, aluminum, tungsten, silicon, chromium and other metals and complex materials. It can be used for large area sputtering on quartz substrates, as well as small area deposition on sapphire and glass substrates. The machine is also capable of conducting multi-layer processes including ITO layers and SiO2 layers. ULVAC MLX-3000N provides exceptional process control and uniformity of films, which is largely attributed to the fully automated tool. With incorporated Process Control Software (PCS), the asset ensures superior process control and maintains accuracy over long periods of time. The PCS also enables more complex processes such as gradient and off-axis sputtering. MLX-3000N is a highly cost-effective solution for depositing high quality films on any material. This sputtering model is durable, reliable, and energy efficient, making it an ideal choice for a wide range of applications.
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