Used ULVAC MLX-3000N #9236603 for sale
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ID: 9236603
Vintage: 2000
Sputtering system
Si wafer
Process gases: Argon, O2, Ni, Ta, Cr, Cu
Target: Cu
O2 Chamber S3 exists
Power on only (No wafer transfer confirmed)
C6 Turbo (TMP-303LM) nonfunctional
Missing parts:
Display
Front panel
2000 vintage.
ULVAC MLX-3000N is a sputtering equipment developed and manufactured by ULVAC, a leading provider of advanced thin film deposition technology solutions. This sputtering system is designed for precision thin film deposition processes. The unit is equipped with multiple sputtering sources (up to 4 targets) for simultaneous deposition of metals, semiconductors and dielectrics. It has a closed magnetic field plasma sputtering chamber with an apertured cylindrical target and a rotating shutter, providing uniformity in area. This allows for deposition of thin films throughout the substrate surface, without shadowing due to the effective area. The product boasts of a multi-zone sputtering configuration, enabling simultaneous deposition of multiple layers on large-scale substrates. The highly efficient spectrum scanning control machine allows for deposition of fine patterns with precision and accuracy. It also has a built-in optical emission spectroscopy function, which provides real-time monitoring of the process parameters. The large-capacity vacuum pumping tool ensures low frequency vibrations and uniform mass distribution during the process. The asset is capable of high-rate deposition with uniformity without alteration to substrates, due to an automated process control model. MLX-3000N is an industrial grade sputtering equipment that is designed to meet the highest standards for efficiency and uniformity in coating deposition processes. It is available with a wide range of optional features, including a chromate metalizer, which provides exceptional quality metal coatings. This system is suitable for PVD applications such as automotive, aerospace, military, medical, and consumer applications. ULVAC MLX-3000N is an affordable and easy-to-operate sputtering unit, perfect for state-of-the-art thin film deposition in industrial applications. It offers a reliable, precise, and uniform coating solution with excellent results and high yield.
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