Used ULVAC MLX-3000N #9279394 for sale

ID#: 9279394

Manufacturer:

ULVAC

Model:

MLX-3000N

Vintage:

2000

Equipment Details:

Sputtering system
Multi chamber type (C to C)
Substrate size, 6" diameter

(2)Cassette-chamber
(2)Sputter chamber
(1)Etching chamber

Vacuum pump:
CRYO pump
Dry pump

Sputter source: Cathode 12" diameter
DC power source
Process gas: Ar

2000 vintage.
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