Used ULVAC MLX-3000N #9279394 for sale

ULVAC MLX-3000N
Manufacturer
ULVAC
Model
MLX-3000N
ID: 9279394
Vintage: 2000
Sputtering system Multi chamber type (C to C) Substrate size, 6" Diameter (2) Cassette-chambers (2) Sputter chambers (1) Etching chamber Vacuum pump: Cryo pump Dry pump Sputter source: Cathode 12" diameter DC power source Process gas: Ar 2000 vintage.
ULVAC MLX-3000N is a high performance sputtering equipment designed for a variety of applications. It utilizes a target-driven in-line sputtering process to deposit precise and uniform films on substrates. MLX-3000N offers precise ion dosing capabilities for controlling the film thickness and stoichiometry, as well as high film uniformity and reproducibility. The system uses four power supplies which are adjustable in 0.01V increments, adjustable pulse frequency, and adjustable ion current range from 100nA to 1mA. The unit also has an easy-to-operate software platform which enables the user to customize the parameters to fit specific deposition needs. The sputtering machine contains a 360° dual target, four-column chamber and a standard pressure range of 0.004-2.8 Pa (30 mTorr-400 mTorr) operating temperature up to 100°C. It is equipped with a high-definition digital imaging mechanism and advanced video processing technology for better view on the substrate's surface. ULVAC MLX-3000N supports both DC and pulsed DC sputtering as well as reactive/HI-ion sputtering. It is also capable of performing arc sputtering for highly reactive sputter processes. The tool offers a number of features, such as automatic target control, dynamic chamber cleaning, substrate heating control, target protection, software-controlled timing, automated substrate holder tension adjustment, and automatic chamber maintenance. These features make MLX-3000N ideal for a number of applications including deposition of nitrides, oxides, metals, and oxynitrides for flat panel displays, thin film batteries, sensors, optical coatings, and various other electronic coating needs. The asset also offers a number of safety features. The process chamber and backing magnets of ULVAC MLX-3000N are magnetically shielded for protection from EM interference, and the model contains various safety sensors to ensure safe operation. Additionally, MLX-3000N is equipped with an advanced vacuum monitoring equipment that monitors and displays the condition of the vacuum system in real-time. This unit also implements a series of self-diagnostics designed to alert the operator when it detects any problems or potential danger during processing. Overall, ULVAC MLX-3000N is an excellent sputtering machine that offers precise, reproducible, and uniform results for a variety of applications. With its easy-to-use interface, high quality features, and safety features, it is an ideal choice for many deposition needs.
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