Used ULVAC MLX-3000N #9280607 for sale

ULVAC MLX-3000N is a feature-packed magnetron sputtering equipment designed for precise layer deposition and material growth on a wide range of substrates. The system can be used in many applications, such as thin-film deposition, gate-level device structures, and dielectric layers. Its robust design allows for sputter-pinpoint accuracy and uniform film thickness. MLX-3000N is equipped with a 13.56 MHz single magnetron vacuum-only sputter tool, capable of producing high deposition rates and uniform sputter deposition. The unit is equipped with ULVAC advanced sputter power source, an integrated master-slave power supply machine, allowing for fine control of sputtered layer's characteristics. The open-architecture design enables compatibility with most chamber components, making the tool highly versatile. The asset is designed to minimize gas leakages with high flexibility and configurability. It features a Quad-Ring ChamberTM indicating four stainless steel sealing ring structures. The seals reduce gas leakage, and are highly configurable and easy to replace for quick maintenance. ULVAC MLX-3000N utilizes the Vacuum Digital Interface Unit (VDIU) for control and monitoring which meets all industrial safety standards. The large sample load-lock chamber, oriented horizontally, utilizes a unique semiconductor sample stage for sample handling and transfer. Its four-stage sample cooler allows for cooling of samples and substrates to below room temperature. The model's advanced software suite enables users to quickly set up high-precision predictive sputtering processes. MLX-3000N operates in both UHV and Low Vacuum (LV) modes, allowing for very high control in process conditions and enabling complex substrates with high aspect ratios. Its integrated plasma generator is temperature-controlled, enabling rapid start-ups without nitrogen gas for reconditioning. All of these features allow for reliable sputter deposition in a wide range of applications. Overall, ULVAC MLX-3000N is a reliable sputtering equipment perfect for precise layer deposition. Highly configurable and easy to use, this system provides robust sputter pin-point accuracy. It is an ideal tool for applications ranging from thin-film deposition to gate-level device structures.