Used ULVAC MPS-4000-C4 #9279708 for sale

ULVAC MPS-4000-C4 is a four chamber Large Area Magnetron Sputtering equipment. The system consists of four SDC-S250 process chambers that are cooled with liquid nitrogen. The chambers are all space-saving and feature Substrate-to-Magnetron (STM) distance of less than 28 inches. This enables the efficient use of high power deposition and takes advantage of the shorted deposition times without sacrificing uniformity over large area. The dual source configuration on each chamber allows a variety of target materials to be used for different structural configurations. The chambers are equipped with a low thermal diffuse reflector for higher deposition rates, low-temperature deposition of stainless steel targets, and a large viewfinder unit. This systems allows a uniform, homogeneous sputtering with high ionization rates, stable plasma conditions, and uniform deposition rate. The machine is also equipped with a multi-anode power supplies and main control hardware. MPS-4000-C4 is provided with a fully automated process recipes from ULVAC which allows you to configure and optimize deposition recipes on user friendly control software. This tool also features a built in automatic target exchanger, allowing for multiple target applications to be used in one asset. The model is designed for very large sample sizes up to 600mm diameter and can deposit thicker films of a wide variety of materials including metals, oxides, and nitrides. The main advantage of this equipment is its capability to deposit films from a lower temperature range with high quality and uniformity. The low-temperature sputtering process helps to reduce process cost and minimize contamination. The system also has a self-regulation mode and sensors that monitor the atmosphere in the chamber to reduce contamination. ULVAC MPS-4000-C4 unit is ideal for producing large-scale high-quality optical and electronic coated glass substrates and is perfect for a wide range of applications from flat panel displays to solar cell products. The machine is ideal for research and development, industry-wide production, and for specialized coating applications.