Used ULVAC MPS-5000-HC6 #9156847 for sale

ULVAC MPS-5000-HC6 is a state-of-the-art sputtering equipment designed for high-quality thin-film deposition applications. The system is composed of an 8-inch single-cell magnetically-enhanced planar sputter source, an 8-inch substrate holder, a high-vacuum chamber, an optical emission spectrometer (OES) module, and dedicated software. The sputter source features an ultra-low voltage, low-EMI electron gun, as well as a multiple-magnetron, high-capacity target design for improved sputtering uniformity and stability. The substrate holder is controlled by a micropositioner with a patented method of neutralizing electrostatic charges, which ensures precise substrate positioning and coating uniformity. The chamber of MPS-5000-HC6 is outfitted with a gas injection unit for the introduction of reactive gases, as well as an exhaust unit with two moving blades and two fixed shields to protect the chamber interior from contamination. The OES module is integrated in the chamber and allows real-time monitoring and automatic control parameters during sputter deposition. The dedicated software simplifies and automates sputtering operations with various recipes and parameter adjustments, and features a fully-automated sample loading/unloading machine. Additionally, it permits the storing of sputtering recipes and checking of the chamber status. ULVAC MPS-5000-HC6 is an attractive option for those seeking a reliable and efficient sputtering tool for the deposition of high-quality films.