Used ULVAC PME-200 #9070529 for sale

ULVAC PME-200 sputtering equipment is a highly versatile advanced sputtering system designed for a variety of thin film applications. The unit has been designed with a modular, multi-configuration frame which allows it to accommodate multiple PVD processes including thermal and reactive sputtering. The machine comes with two sputter chambers, each equipped with up to two magnetron sputter cathodes. Each of the sputter chambers can accommodate as many as four substrates, with each substrate on an independently driven substrate holder. The flexible design of the tool enables the user to quickly and easily change the substrate type, target composition, and sputter parameters in order to best meet the demands of the application. PME-200 is powered by a high-frequency, pulse-modulated power supply which can generate high-frequency pulses with repetition rates up to 3 kHz. The PACMAN automated controller is designed to minimize operator intervention by automatically setting the optimal values for sputter parameters and substrate temperature. This allows for a uniform, repeatable deposition on each substrate. The spring-loaded showershield design provides superior deposition uniformity by shielding the entire substrate area from charged particles created by sputtering. The susceptor design allows for high-density deposition of target material, and up to five rare-gas lines can be connected to the asset for reactive sputtering processes. ULVAC PME-200 also features a robust cooling loop which provides both temperature control and particle extraction of the chamber, helping to maintain a clean processing environment. Finally, PME-200 comes with an intuitive human-machine interface which allows users to easily configure the sputtering process, store setup configurations, and provides full model control and monitoring. The equipment also includes a number of safety features, such as a door lock-out system with interlock activation, temperature monitoring, and automatic shut-off in the event of any abnormal occurrences. All of these features come together to make ULVAC PME-200 a powerful, flexible, and reliable tool for a wide range of thin film applications.