Used ULVAC SBH-2306-DE #9055122 for sale

ULVAC SBH-2306-DE
Manufacturer
ULVAC
Model
SBH-2306-DE
ID: 9055122
Vintage: 1993
Sputtering system 1993 vintage.
ULVAC SBH-2306-DE sputtering equipment is a high-performance tool designed to create layers of high-precision thin film materials in a vast variety of applications. This state-of-the-art system utilizes physical vapor deposition (PVD) technology, which is a vacuum-level deposition technique in which a sputtering source is used to bombard a target surface and transfer atoms or molecules of the target material to a substrate. SBH-2306-DE features independent rotary sputtering chambers to produce films of high uniformity and precision as well as dual magnetron sources for simultaneous sputtering targets with different compositions. It can process up to two substrates or targets in a large vacuum chamber with a base pressure down to 1e-5 Pa, as well as multi-layer thin films from soft metals, alloys, silicides, and oxides. The substrate size can accommodate substrates from 4 inches to 8 inches, with a maximum substrate size of 300 mm. The unit is equipped with a versatile optical monitoring machine, which helps with measurements before and after processing, and a remote diagnosis tool for defect analysis. Its intuitive software enables easy data input, providing the user with all the necessary information to yield good results. Furthermore, ULVAC SBH-2306-DE is capable of performing advanced processes with excellent repeatability, providing the highest efficiency and productivity for the most demanding applications. The design of the asset incorporates both water cooling and air cooling for better heat control when processing large substrates. SBH-2306-DE is designed with safety and user convenience in mind, with features such as automatic deposition thickness control, avoiding gas leaks and optimized operation settings for the required application. This powerful sputtering model is a valuable asset to the research and production processes of industries such as automotive, medical electronics, solar cells and microelectronics, with its unmatched versatility and performance.
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