Used ULVAC SBH-2306 #9107295 for sale

Manufacturer
ULVAC
Model
SBH-2306
ID: 9107295
Sputtering system, 1980 vintage.
ULVAC SBH-2306 is a sputtering equipment used for a variety of applications such as depositing thin films of material onto substrates. It has a dome-shaped vacuum chamber that provides a hermetically sealed environment, and uses a gas injection system for optimal temperature control. Inside the chamber is a multi-target sputtering gun with four RF sputtering cathodes for different coating configurations. It has a programmable pulses/timer to control the sputtering duration and a bias voltage source to control the plasma density. SBH-2306 is capable of deposition speeds in the range of 0.1 to 10 nm/min for thin film coating. It also features a compact and easy to use controller that can support up to ten sputter parameters including target angle, chamber pressure, gas flow rate, and sputtering voltage. This sputtering unit is able to facilitate reactive ion sputtering, oxidation and oxidation-free coating processes. It has an in-situ pressure monitored chamber and a high-pressure gas injection machine for better process control and improved repeatability. ULVAC SBH-2306 is also equipped with a turbo molecular pump for high vacuum operation, which is necessary for low-stress sputtered coatings. Additionally, it has a nitrogen purge port to accelerate the pump down time. The chamber also features two ports for material introduction, one for the aluminum target and one for reactive gas, as well as a viewport for controlling the entire sputtering process in real time. In order to ensure the best performance, ULVAC sputtering systems have high end microprocessor controllers with multiple and precise sputter parameters, to provide best process control. There are safety features, such as an audible and visual alarm for alerting the operator if a unsafe process conditions are detected. This tool also includes a maintenance menu, so that the operator is able to take corrective measures with ease. Overall, SBH-2306 is a highly advanced sputtering asset that provides reliable, repeatable and precise thin film coating results for a variety of different applications. It is equipped with many features to ensure safe operation and can deliver high quality results with a minimal investment.
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