Used ULVAC SBH-2306 #9156856 for sale

ULVAC SBH-2306 is a sputtering equipment designed for the deposition of thin film onto substrates. It is ideal for the creation of fine structures with a superior uniformity. The system comprises of a rotary sputtering gun, a vacuum chamber, and a rotative lift table. The sputter gun is designed for both reactive and non-reactive sputtering. It utilizes three gun modes to accommodate various sputtering needs. These include power modulated, radio frequency (RF) modulated, and DC magnetron sputtering. The gun is equipped with a range of targets to cover a wide range of materials to be sputtered. The vacuum chamber is mechanically pumped and supplemented with a rotary vane roughing pump. It also has a separate turbo pump for high vacuum operations. Gas exhaust and venting systems are built-in to facilitate process related operations. The rotative lift table is capable of the rotation of substrates in and out of the sputter path and is also used to save substrate space. SBH-2306 offers a number of additional features including substrate temperature control, digital vacuum gauge, closed loop process monitoring, and an automated glow discharge cleaning and conditioning unit. The overall size of the machine is small with a footprint of 89" in length and 30" in width. This tool provides excellent performance with reproducible results. It is well suited for thin film applications such as ITO coating, SiO/SiN coating and PECVD film deposition for OLEDs, and metal/insulator multilayer systems. ULVAC SBH-2306 offers an excellent capability to create fine features while maintaining superior uniformity.