Used ULVAC SBH-5315 #9053711 for sale

ULVAC SBH-5315
Manufacturer
ULVAC
Model
SBH-5315
ID: 9053711
Vintage: 1985
Sputtering system, 1985 vintage.
ULVAC SBH-5315 Sputtering Equipment is a comprehensive thin film deposition platform for a wide range of research and industrial applications. It is capable of depositing uniform, high quality thin films of various materials including metals, semiconductors, and insulators. It is specifically designed for very high deposition rates while still maintaining a high level of repeatability and accuracy. These characteristics make it well-suited for a variety of sputtering deposition processes such as cathodic arc evaporation (CAE), planar magnetron sputtering (PMS), and reactive sputtering. The system is equipped with a three-target DC/RF modular platform that facilitates the deposition of both single and multi layer thin films. It utilizes ULVAC proprietary technology, frequently referred to as the "Gunn Effect", which produces uniformly-thick layers. This enables the sputtering process to be controlled accurately, as well as to attain high deposition rates. The unit also comes with a comprehensive hardware suite, including sensors, temperature monitor, computer interface, and control machine. This allows for precise, automated control of the sputtering parameters as well as the deposition rate. Furthermore, the tool features a vacuum chamber with a four-quadrant design that can house multiple targets and substrates. A powerful turbomolecular vacuum pump is used to evacuate the chamber, thus allowing for efficient and low-temperature materials deposition. SBH-5315 also employs a temperature control asset which prevents undesired outgassing and ensures temperature stability throughout the entire deposition process. In addition, the model incorporates several safety features, such as automatic shutoff systems which bring the entire equipment to a halt if conditions become unsafe due to system failure or human error. The unit also features advanced data logging capabilities which enable the user to record the deposition process, as well as track and analyze data in real time. Overall, ULVAC SBH-5315 is a highly versatile, user-friendly sputtering machine that is capable of providing reliable, high-performance thin film depositions. It is equipped with a wide range of features that facilitate accurate process control, temperature regulation, and process monitoring. It is a suitable choice for researchers and industrial users who require high-quality thin film materials for various applications.
There are no reviews yet