Used ULVAC SCH-1000 #9314701 for sale

ULVAC SCH-1000 is a compact, highly advanced sputtering equipment designed for a variety of research and production applications. The system can be used for a wide range of sputtering applications, including the thin film deposition of glass, aluminum, silicon, and other materials. The unit is equipped with a two stage RF power supply for greater uniformity and high speed deposition of thin film layers. It also features a 3-D substrate holder to facilitate uniformity across all sections of the substrate, a vacuum chamber for an ultra-high vacuum environment, and a fully automated process gas control machine for superior control of the deposition process. The tool is built with an advanced lithography asset that combines both optical and electron beam lithography in a single machine. This allows for precise fabrication of nanostructures up to several hundred nanometers in size with high accuracy. The model also features a high-speed multi-target sputtering head with up to six targets installed, allowing for high productivity and scalability for production applications. The equipment is capable of performing single layer or multiple layer thin film depositions, with a wide choice of materials and substrate types. SCH-1000 features a precise thickness determination system, with an accuracy of up to 5 angstroms, facilitated by its real-time non-contact optical thickness monitor. It also has a built-in gas pressure monitor, which helps maintain clean process conditions for consistent results. With its 3D substrate holder, it is also capable of achieving uniformity for multiple layers across the entire substrate. ULVAC SCH-1000 has been designed to increase throughput with its quick alignment, short cycle times and quick substrate changeovers. Its easy-to-use graphical user interface also makes for easy operation. This reliable and efficient sputtering tool can be used to deposit a variety of thin films, from oxides to metals, on various substrate substrates, including flexible plastics. With its wide range of applications and reliable performance, SCH-1000 is an ideal sputtering solution for most research and industrial needs.