Used ULVAC SCH-135 #293623029 for sale

Manufacturer
ULVAC
Model
SCH-135
ID: 293623029
Sputtering system.
ULVAC SCH-135 is a sputtering equipment manufactured by ULVAC, Inc., a company that specializes in sputter deposition technologies. SCH-135 is a DC/RF-enhanced PVD sputter coat deposition system utilizing vacuum arc technology. The unit features independent DC and RF bias power supplies, variable power output, and three-electrode arc control. It has two sputter sources, an 8-inch and a 4-inch, for faster and more efficient coating. The machine also has two targets that can be individually or simultaneously used for deposition. ULVAC SCH-135 provides superior performance in the sputtering of a variety of materials, including magnetic materials, transparent conductive films, etc. SCH-135 has a sputter width of up to 8 inches, allowing for larger surface areas to be sputtered in one pass, and it has a sputter area speed of up to 30 cm2/min, providing improved coating uniformity. The tool is capable of operating under a high vacuum environment of 10-5 Pa, achieving a higher deposition rate and improved performance. The chamber pressure can be controlled by the integrated VETM (Vacuum Enhanced Technology Module) feature, and it can be adjusted during operation according to the deposition material, process temperature, and desired coating uniformity. h ULVAC SCH-135 also has a variety of additional features including optical window, target cleaning and cooling mechanisms, an RF-shielded power supply, and an integrated remote monitoring asset. This makes the model ideal for research and development applications, as well as for various industrial applications requiring a quality sputter coating. SCH-135 offers a reliable high level of performance, with repeatable results. It supports a wide range of materials and films, and its operation is cost-effective, even for small-volume coating applications.
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