Used ULVAC SDP-651 #9379485 for sale
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ID: 9379485
Sputtering system
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ULVAC SDP-651, manufactured by ULVAC-PHI, Inc., is a high-precision and cost-effective sputtering equipment that is designed for high-volume deposition of thin films. This system features a small footprint, with a maximum width of 808mm, height of 875mm, and depth of 1150mm. It has a 9-inch sputtering target which is capable of depositing up to 24 targets. The unit is powered by a powerful direct current (DC) power supply and is capable of delivering up to 350W of power for the deposition of thin films. It utilizes a single-frame, open-type deluge sputtering gun mounted with single-or double-sided targets. The single-or double-sides targets can be loaded by mechanical type, electrical raising machine or manual loading. The tool is capable of delivering outputs of up to 75mA/in2 and 20mTorr. SDP-651 is equipped with a process controller that monitors process conditions, including temperature, sputtering pressure, and voltage. The monitoring is done through an infrared temperature sensor, a residual gas analyzer, a pressure gauge, a target current monitor, and a voltage power monitor. It can be configured for manual or automatic operation, allowing for 18 different language options. The asset uses an advanced, extended working distance susceptibility to provide high uniformity and uniform deposition. It also offers a wide range of substrate materials and sizes, which can be changed without the need for a new target setup. The extended working distance is designed to minimize the effect of the substrate on the deposition results. ULVAC SDP-651 is specifically designed to provide the highest-quality thin film deposition results. The model is equipped with high-efficiency, uniform deposition, uniform thickness, high purity, and low thermal variation features, making it an ideal choice for depositing thin films in both organic and inorganic material applications.
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