Used ULVAC SDP-850 #9379484 for sale
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ID: 9379484
Sputtering system
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ULVAC SDP-850 is a sputter deposition equipment designed for highly precise film deposition applications. This system combines ULVAC existing magnetron sputtering technology with newly integrated PI technology to produce uniform, even films with high accuracy. Its leading sputtering source offers superior plasma control for an extremely wide range of materials. This helps ensure consistent and reliable film deposition at high precision, even over varying flow rates and materials. The unit is managed and operated from a touchscreen PLC, providing users with an easy-to-use interface for controlling various machine functions. SDP-850 also maintains a constant vacuum environment within the chamber, which enhances vacuum deposition efficiency and helps reduce contamination. An additional feature of the tool is its use of ceramic enclosed boat cathodes, which make for easy operation and maintenance due to their sealed condition. Safety is an important factor incorporated into the design of ULVAC SDP-850, as it is fastened with a grounding connector and various ionizers and magnetic shields to effectively protect personnel and equipment from any plasma shocks. Its dual gas control asset provides an added level of security, allowing for simultaneous control over both low and high pressure flows while still providing a uniform gas distribution. SDP-850 is renowned for its ability to perform film depositions on large area substrates with a maximum sample size of 300 mm in diameter and a maximum thickness of 1000nm. Its large working area also allows for deposition of multiple layers on the same substrate during a single process. Overall, ULVAC SDP-850 is an innovative sputter deposition model that provides high accuracy, uniformity, and safety, as well as a wide range of materials and process sizes. Its user-friendly interface enhances its operability and simplicity, while its advanced control and safety systems ensure reliable results with minimum operator intervention.
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