Used ULVAC SH-350 #9145272 for sale
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ID: 9145272
Vintage: 1988
Sputtering system
Chamber Φ 500 × 250 hmm
Magnetron Φ 4 "× 3 groups with reverse sputtering
RF 1000W Vacuum gauge with substrate rotation and heating
DP 6 "RP 618L / min
AC200V 3Fai 2KVA air pressure: 6kg / cm2G
Cooling water: 2kg / cm2G
1988 vintage.
ULVAC SH-350 is a robust, high quality sputtering equipment designed for industrial use. This sputtering system features a compact design, allowing it to be easily integrated into a variety of industrial production lines. It utilizes a robust rf-source that can power up to 350W, giving it one of the highest power levels amongst other sputtering systems on the market. SH-350 is designed with three main components - the source, the chamber and the vacuum pump. The source is a fast, powerful and reliable module, capable of producing high rate sputtering. The chamber of the unit is designed to be easily accessible, allowing for quick and easy maintenance and color coating. It is also designed with a high beam angle, ensuring an even and efficient sputtering process. ULVAC SH-350 also has an advanced vacuum machine, which encompasses a combination of turbo-molecular pumps and cryo-pumps. This combination ensures a low ultimate vacuum of 5 x 10^-7 Pa and high deposition rates. Additionally, this tool provides temperature control of up to 100˚C, and can be programmed to reach specific temperatures with its advanced temperature control asset. Furthermore, SH-350 features advanced filtering, as well as a closed pumping model which eliminates leaks and contamination, making it suitable to use in high vacuum environment. Additionally, it is equipped with an automatic pressure control equipment, allowing for precise pressure control, as well as continuous adjustment during sputtering operation. Overall, ULVAC SH-350 is a powerful and reliable sputtering system that is highly suitable for industrial production processes. Its advanced design and built-in features make this unit capable of providing high sputtering rates and uniform coating.
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