Used ULVAC SH-350EL-C06 #9078346 for sale

ULVAC SH-350EL-C06 is a sputtering equipment designed and manufactured by ULVAC Inc. It is a multichamber system which can be used to deposit thin films on substrates in a single step. It is suitable for industrial scale batch processing and supports a range of processes such as reactive sputtering, DC reactive magnetron sputtering, reactive ion etching, and ion beam deposition. SH-350EL-C06 consists of an evacuated main chamber with a manual transfer unit, a process chamber, a substrate holder/cooler, and a load locker. The main chamber has a chamber pressure gauge, water-cooled panels, and a variety of ports such as load lock ports and throttle valves that allow for a variety of connected process chambers. The process chamber is equipped with up to four targets depending on the material being deposited, a vacuum pump connected to the bottom of the chamber, and a quartz showerhead lining the roof of the chamber to ensure uniform deposition. The chamber can be operated with either a DC or a RF powered source. The substrate holder/cooler is designed to house up to two substrates, the specifications of which are adjustable. The holder can accommodate substrates up to 700 x 700mm, and is equipped with temperature sensors to monitor and maintain substrate temperature between 10 and 40 degrees Celsius. Additionally, the substrate holder has a rotating disc base and is equipped with a non-contact susceptor and an in-plane 'tilt rotation' mechanism should an inclined angle or rotated angle be required during deposition. Finally, the load locker is designed with a front openable gate, enabling substrates to be loaded and removed without interrupting the process. It is equipped with a quartz or alumina liner to ensure that the smoothness of the substrate does not change. Additionally, the lock chamber is capable of accommodating up to four loads simultaneously with through quartz seals which provide an oxygen-free environment in order to prevent oxidation or reactions with residual atmospheric gases. In summary, ULVAC SH-350EL-C06 multichamber sputtering unit is perfectly suited for industrial scale batch processing and offers a range of options which allow for a variety of deposition processes. It is easy to use due to its intuitive design and features, and efficient due to its closed machine. It is an excellent choice for thin film deposition for those who require a reliable and robust sputtering tool.