Used ULVAC SH-450H-C10 #9313937 for sale

ULVAC SH-450H-C10 is a DC-magnetron sputtering equipment that can be used to create thin films of various materials. It is a three gun, dual chamber device and features a robust power supply system. The unit is highly automated, with an advanced user interface that enables the operator to select and modify sputtering parameters with ease. SH-450H-C10 has a high vacuum chamber that can sustain an operating pressure of 6x10̄³ to 4x10̄⁸ Pa. It is powered by a robust power supply of either 2.5 or 4 kW, with the option to extend the power to 6 kW, enabling rapid sputter deposition rates. It has a large sputtering blast chamber suitable for a wide variety of target materials, with three 6" EUV targets. The chamber is also equipped with a 4" wafer compatible bell jar. ULVAC SH-450H-C10 has two optical systems with square apertures. The first is an elliptical collectors with an inner slit, whilst the other is a Quartz Crystal Monitor, enabling real time monitoring of the process parameter and quality assurance. The machine also has an integrated cryogenic cooling tool to ensure a stable process. Furthermore, SH-450H-C10 features a three gun mechanism. Of the three guns, the Central Apex Gun Asset has a slotted-ring magnetrons, while the other two guns have diaphragm flat magnetrons. The model also offers a wide range of reactive gas sputtering using either high vacuum enteral gas injection or low pressure gas shroud. Overall, ULVAC SH-450H-C10 is a powerful and versatile equipment for DC magnetic sputtering applications such as the deposition of thin films of conductive, semi-conductive and dielectric materials. It offers a combination of high deposition rates, low contamination, good throughput, and small particle generation, making it an ideal choice for deposition of materials in a variety of areas such as electronics, optics, nano-science and engineering.