Used ULVAC SMD-1800 #9384066 for sale

ULVAC SMD-1800 is a high performance sputtering equipment that is often used in the fabrication of Thin Film Devices. It is designed for industrial applications in which superior sputter coating quality is critical. SMD-1800 utilizes a diode-type RF sputtering process for high-rate patterned sputter deposition with an integrated five-axis robotic arm. The sputtering unit is a dual-head configuration with external magnetron sources and individual DC or RF power supplies for each source. The unit offers a broad range of collector materials such as Aluminum, Titanium, Copper, and Alloy. The system has a flexible interior structure for easy maintenance and serviceability with easy manual alignment adjustment of the sources. The adjustable sputtering pressure chamber allows for precise control of the argon environment making it ideal for patterned and uniform sputtering deposition on planar substrates. The RF frequency is adjustable which, in combination with an externally applied axial magnetic field, enables a greater flexibility in the deposition of films. The unit also has an optional substrate heating plate to facilitate increased deposition uniformity, as well as several in-situ monitor tools for increased process control. ULVAC SMD-1800 is a fully automated machine with real-time job control and process optimization GUI. The robotic arm can accommodate up to 6"x6" substrates and is capable of transferring both patterned and unpatterned substrates to and from the sputtering environment. This makes it ideal for applications ranging from planar data storage devices, to thin-film transistors, and other sputter deposition applications. The overall tool is a highly efficient asset, offering an excellent process capability and quality. It is well suited for deposition and coating of thin films at high speed with precision and accuracy. It is also highly safe, with several features to protect against accidental hazards. With excellent sputter rate, thickness uniformity, and process stability, SMD-1800 is sure to give you the results you are looking for.