Used ULVAC SMD-450 #9269728 for sale

ULVAC SMD-450 Sputtering Equipment is a high-precision sputter deposition system that is used for depositing thin films onto samples for a variety of applications. The unit consists of a multi-chamber machine that offers a variety of sputtering options, including a magnetron sputtering tool, electron-beam evaporation, and a shutterless sputter deposition asset. Each component chamber of SMD-450 Sputtering Model operates independently and utilizes its own process controller with an operating pressure of up to 1.0 mTorr. The load-lock chamber is used to introduce samples into the equipment, and also to perform degassing and sample preparation centrifuge operations if required. The system can also be used to process various substrates, such as glass, quartz and ceramics, as well as crystalline materials, such as Si, SiGe, and Ge. The sample size range for the unit is from 5mm x 5mm to 200mm x 200mm. The magnetron sputtering machine of ULVAC SMD-450 can be used for depositing films of metals such as Al, Cu, Au, Ta, Ag, and Ni. By utilizing the latest technologies, the tool is capable of producing high-quality thin films with low residual stress and excellent adhesion. In addition, SMD-450 is also equipped with an in situ plasma monitoring asset, enabling accurate process control and measurement of the properties of the deposited films. The electron-beam evaporation component of ULVAC SMD-450 utilizes an electron-beam gun mounted to the side of the sputtering chamber. This component is ideal for use in evaporation applications, such as deposition of specialty metals, alloy deposition, and silicide formation. The shutterless sputter deposition model that is integrated into SMD-450 offersfast and reliable processing times due to its ability to deposit several layers of material continuously without requiring mechanical shuttering of the process chamber. Finally, ULVAC SMD-450 offers the user a wide range of process control options, including an automated temperature control equipment and a real-time monitor for the sample chamber that delivers precise sputter deposition time, uniformity, and uniform surface coverage. SMD-450 is a reliable and high-precision sputtering system that can provide accurate and repeatable deposition results for a wide range of applications.