Used ULVAC SMD-450 #9269730 for sale

ULVAC SMD-450
Manufacturer
ULVAC
Model
SMD-450
ID: 9269730
Sputtering system (2) Power panels Rotary pump rack (RP6) Inverter.
ULVAC SMD-450 is a DC magnetron or diode sputtering equipment, designed for vapor deposition of thin films on a range of substrate materials. This equipment is capable of providing both low and high deposition rates, as well as high thickness resolution. Sputtering systems are used for production processes in semiconductor, MEMS, and optical device fabrication industries. SMD-450 offers a high-performance 75mm sputtering chamber with a total size of 630mm x 725mm x 1035mm. It is designed to accommodate up to 450mm wafers and has a 350mm x 350mm rotating turntable for a uniform deposition of thin films across the wafer surface. The system is equipped with a three-magnetron polarized sputter configuration for uniform thickness control. To ensure reliable operation, the unit is equipped with a 13.56MHz RF power source and a temperature controller. Additionally, ULVAC SMD-450 includes a universal vacuum source for highly uniform and efficient operation. To control SMD-450, the machine is equipped with a high-tech touchscreen interface. Users can quickly and easily program the tool parameters such as sputter power, deposition time, and other parameters to meet their needs. The asset also has an intuitive and user friendly software to simplify operational procedures. Overall, ULVAC SMD-450 is the perfect solution for the production of high-quality thin films for a range of applications. It offers the perfect combination of versatility, performance, and reliability for efficient operation. With its intuitive software and touchscreen interface, users can quickly and easily program the model to meet their application needs. This gives users the flexibility and precision they need to produce high-quality thin films for a wide range of applications.
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