Used ULVAC SMD-450 #9269735 for sale

ULVAC SMD-450
Manufacturer
ULVAC
Model
SMD-450
ID: 9269735
Sputtering system Robot crene.
ULVAC SMD-450 is a high-performance sputtering equipment manufactured by ULVAC. It features an advanced, fully automated deposition process that enables high-quality, repeatable thin film deposition of a variety of materials. The system is designed to be compatible with various vacuum chamber configurations and has a user-friendly operating interface. SMD-450 features a robust source design capable of achieving high sputtering power and deposition rates. It has a processing chamber volume of 450 liters and a maximum deposition rate of up to 4nm/s. The unit includes a rotating substrate holder with a heated chuck, allowing for sample rotation speeds of up to 300 RPM. It can accommodate substrates with sizes of up to 200mm in diameter, and the deposition target size can be customized to fit various shapes and sizes. ULVAC SMD-450 is equipped with a protected sputter source that provides uniform and repeatable sputter deposits across all substrates. The machine also offers several built-in process control features, including infrared pyrometry, precise temperature monitoring and control of heaters, and a high-speed relocator for substrate placement. Additionally, the tool has an integrated robot arm that makes it easy to manage, load, and unload substrates on the fly. SMD-450 is contact-free sputtering asset that is capable of depositing materials such as silicon nitride, aluminum oxide, and titanium. The model is a reliable and cost-effective alternative for producing thin films with uniform thickness styles across different substrates and components. ULVAC SMD-450 is an excellent tool for research and development of advanced thin film processes.
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