Used ULVAC SMD-850BX #9285746 for sale

ULVAC SMD-850BX
Manufacturer
ULVAC
Model
SMD-850BX
ID: 9285746
Sputtering system Substrate size: 680 mm x 880 mm.
ULVAC SMD-850BX Sputtering Equipment is a versatile and high-performance system designed to deliver uniform and smooth sputtering deposition of thin films of metallic, alloy, dielectric and ceramic materials. The unit utilizes a vacuum chamber and various plasma-induced processes to deposit films onto a moving substrate. SMD-850BX utilizes a planetary substrate holder and provides a custom sputter target or a circular magnetron arrangement to sputter materials from the target surface onto the substrate. It is designed to enable high-accuracy and repeatable processes, offering reliable and uniform deposition through ULVAC innovative plasma control technology. The machine is equipped with a high-performance ion source to enable ion-assisted etching and cleaning processes, and also boasts advanced gas control technology to maintain desired plasma-chemical states during various treatments. ULVAC SMD-850BX offers a wide selection of workpieces with a variety of sizes and shapes to be handled by its planetary substrate holder, which is designed to enable stable deposition and etching. With its advanced four-axis electro-magnetic motion control tool, this sputtering asset provides precise and uniform sputtering deposition while at the same time providing accurate control of temperature. SMD-850BX model offers powerful uniformity control with its built in controller, as well as feed-forward and feedback control. Additionally, the equipment's substrate bias voltage supply allows for precise control of ion implantation during the deposition process. ULVAC SMD-850BX also offers advanced plasma analysis to provide thorough and real-time monitoring of the sputter process and provides the ability to integrate multiple process chambers. This sputtering system accommodates a wide variety of gases and types of materials, with the option of multiple configurations to suit various sputtering needs. The unit operates in a vacuum range of 1E-4 Pa to 1E-6 Pa and can be used for depositions from materials including metals, alloys, ceramics and dielectric materials. SMD-850BX is an ideal sputtering solution for deposition of thin films for coated glass, optical films, solar cells, liquid crystal displays, circuit boards, and a variety of other products and applications.
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