Used ULVAC SMD-850BX3 #9285784 for sale

ULVAC SMD-850BX3
Manufacturer
ULVAC
Model
SMD-850BX3
ID: 9285784
Sputtering systems Substrate size: 680 mm x 880 mm.
ULVAC SMD-850BX3 sputtering equipment is an advanced method of creating thin film layers by coating a substrate with a wide variety of materials such as metals, ceramics, semiconductors, and dielectrics. Its advanced features include an ultra-short pulsed DC (Direct Current) magnetron sputtering source, an open-load shut-off system, and an optional automated recipe mode. The unit has high uniformity and deposition rates, making it well-suited for high-volume production of thin film layers used in various industries. SMD-850BX3 has a load capacity of up to 5" in diameter and up to 5" thick with a vacuum level of 5x10-6Pa and a maximum temperature of 150°C. The machine utilizes two independent sputtering sources, allowing it to create two different layers of thin film on one substrate. Its other features include multi-layer deposition, the ability to simultaneously sputter two different materials, and a uniform deposited layer of film with no variation in thickness or particles. ULVAC SMD-850BX3 sputtering tool is equipped with a compact turbo-molecular pump that allows for high- speed pumping for rapid evacuation and high gas compression. It also offers an open-load shut-off asset, which shuts off the model automatically when the chamber pressure is too low, preventing damage due to unbalance pressure. Additionally, the equipment has an optional automatic recipe mode which can be programmed to automatically set the required conditions for a particular deposition process. SMD-850BX3 is a reliable and cost-effective sputtering system that offers excellent uniformity and deposition rates for wide range of applications. Its intuitive operating unit is easy to use, making it suitable for both small-scale laboratory and industrial production. Furthermore, its advanced features and capabilities ensure that the substrate is consistently coated with the appropriate material, providing consistent layers of thin film.
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