Used ULVAC SME-200 #9156855 for sale

ULVAC SME-200 is a magnetron sputtering equipment. It is an advanced system used to deposit thin films of specific materials onto a surface. It is an automated unit that allows for repeatable thin film deposition, with adjustable parameters allowing for a wide range of deposition quality and film properties. ULVAC SME 200 machine is comprised of a low vacuum chamber, two independent sputtering sources, an electron-beam source, an RF coater, and a rotary-target source. Utilizing the applicable source, a substrate in the chamber is exposed to either ionized gas particles of a sputtering target, electrons, or radio-frequency waves. The ions, electrons, or radio-frequency waves from these sources strike and dislodge molecules from the target, which then adhere to the substrate, forming the desired film. SME-200 tool can handle two substrates of different sizes, allowing for more efficient production. Both sputtering sources have a power budget of 2kW and are equipped with a focused-magnetron to achieve higher accuracy and repeatability of sputter depth and uniformity. The substrate holder can support single and double-sided wafers with various sizes/types of substrates including glass, quartz, silicon, aluminum and metals. The chamber also has a variable-pressure asset, a turbo pump, and a cryopump allowing for controlled atmosphere and vacuum levels for deposition, allowing for more precise control over the deposition process. SME 200 is equipped with numerous model sensors, enabling real-time monitoring of all process parameters and gas flow. The equipment's software allows for remote manipulation of all parameters during deposition and allow for complete control over the deposition process. Thanks to the system's advanced design and the adjustable parameters, the unit can be used to deposit a range of films of different material and properties, making it a very versatile sputtering machine suited for various applications.