Used ULVAC SME-200E #9379717 for sale

ULVAC SME-200E is a sputtering equipment for deposition of thin films for a variety of applications including semiconductor processing. It utilizes extended magnetic-enhanced (EME) sputtering, a method that combines electromagnetism with sputtering to create coating films on both rigid and flexible substrates. The sputter coating system features advanced technology with high deposition uniformity and precision for production of high-quality films. SME-200E has a reliable, down jet linear target configuration. This allows for precise target operation with three-dimensional etching and the ability to sputter in high vacuum. The unit includes an East/West rotary plane, allowing for easy maintenance and improved compatibility with a wide range of substrates. Its closed-loop control machine offers very steady and uniform sputtering for thin films up to 200mm in diameter. The tool also includes an auto-loading, auto-unloading asset for non-contact substrate manipulation and transfer. This ensures precise positioning, with excellent production yields. ULVAC SME-200E includes both a dual-axis rotation stage, for improved deposition uniformity and a rotating turret-shower model to enable quick, simple target material exchange. The newly created deposition chamber preserves target and substrate conditions, enabling commissioning with any type of coating material. This unique sputtering equipment also features ULVAC exclusive Pack-Anime software for process operation, deposition control and recipe programming. The software offers recipe editing, monitoring and analytical tools that enable efficient, repeatable operation with superior coating uniformity. The user-friendly interface ensures high productivity with minimal downtime for maintenance and adjustments. SME-200E sputtering system is designed for versatile production of high-quality thin films. Its superior technology and advanced features ensure repeatable, uniform and precise deposition of a variety of coatings for semiconductor devices.