Used ULVAC SME-200J #9357605 for sale

Manufacturer
ULVAC
Model
SME-200J
ID: 9357605
Vintage: 2010
Sputtering system (5) Chambers 2010 vintage.
ULVAC SME-200J is a sputtering equipment manufactured by ULVAC Technologies, Inc. It is designed for general-purpose material sputtering and applications such as thin film deposition, adhesion, and electrode fabrication. ULVAC SME 200 J is a self-contained sputtering system, which includes a base cabinet and a target holder unit, and is equipped with an actuating chuck, a number of sample holders, power supply covers, an exhaust machine, and sputtering sources (up to eight sputtering guns). SME-200J's design enables simultaneous operation of multiple sources with different power settings, making it suitable for processes such as MOS (Metal Oxide Semiconductor) deposition, thin film deposition, and electrode fabrication. The deposition rate can easily be adjusted depending on the intended application. The target materials are made of aluminum, copper, gold, titanium, nickel, carbon, etc. Depending on the target material, the sputtering gas is selected accordingly from either argon, nitrogen, hydrogen, or oxygen gas. A load-lock mechanism is provided to minimize the time needed for sample change-overs between sputter processes. SME 200 J also features a controller, allowing the user to easily set and maintain sputtering parameters, including current density, chamber pressure, power and gas flow. Additionally, the tool monitor screen displays process conditions, such as temperature, pressure, chamber status, and total sputtering time. ULVAC SME-200J sputtering asset is a versatile tool for many thin film deposition applications. It is highly reliable and allows for easy operation and adjustment of process parameters. The model also enables multiple sources to operate at the same time, ensuring that the desired sputtering output is achieved quickly and safely.
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