Used ULVAC SPW-030S #9034013 for sale
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ID: 9034013
Wafer Size: 12"
Vintage: 1987
In-line sputter coater, 12"
Includes:
(5) Large sputter cathodes around large process drums
Wide web system, 14"
Sputtering system with plasma treatment
(5) Inline target capabilities
(3) Cryro pumps / (3) Rough pumps with booster pumps
1987 vintage.
ULVAC SPW-030S is a sputtering equipment designed for high-precision sample preparation of semiconductor and other materials. It is equipped with a planar magnetron sputtering source, a twin-plane shutter, and a high vacuum chamber. The system is capable of processing both high and low sputtering power applications, with a power range of between 5 and 120 W. Furthermore, SPW-030S is equipped with an advanced sputtering source cooling unit, which ensures a highly efficient sputtering process and a stable chamber circulation. The machine is also equipped with a reliable automatic sputtering power control and homogenous sputtering deposition rate. The vacuum chamber of ULVAC SPW-030S is equipped with a ceramic turbo pump which is capable of achieving vacuums of up to 1 x 10-6 Torr. It is also equipped with an in-situ angle-of-incidence (AOI) view port that allows the user to monitor the process remotely and accurately. Additionally, it features a large tunnel window which offers ample viewing area for process monitoring. SPW-030S sputtering tool can process numerous materials, including gold, silver, aluminum, titanium, and silicon. It is designed to run on either direct current (DC) or radio frequency (RF) power and can be used in a variety of application-specific processes. Additionally, the asset features a gas delivery model that permits the user to adjust the gas flow rate and pressure according to different process requirements. ULVAC SPW-030S sputtering equipment is ideal for precise sample preparation of semiconductor and other materials, with a high degree of uniformity and efficiency. Its easy-to-read control system, advanced cooling features, and remarkable sputtering stability ensure a reliable and reliable process. Overall, SPW-030S is an advanced and robust sputtering unit that offers superior control over the sputtering process.
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