Used ULVAC SRH-420 #293830631 for sale

ULVAC SRH-420 sputtering equipment is a versatile and efficient tool utilized for creating thin films, specifically for the purpose of creating semiconductor devices. The system features a five-axis robotic motion unit with a 6-inch in-line integrated vacuum chamber structure. The machine includes a manually adjustable angular height adjustment of 0-15° and precision targeting of the sputter target. Additional benefits of SRH-420 include a smaller footprint which results in higher throughput rates and improved workflow. At the heart of the tool is the high-performance RF (radio-frequency) source, which is a single frequency source, operating up to 4kW, providing consistent and uniform output. The RF power source is capable of being applied onto the sputter target via direct contact, as well as non-contact inductive coupling, which makes it possible to sputter dielectric films. Additionally, the asset is capable of the simultaneous deposition of up to four materials, enabling the production of multilayer and multi-component thin films. ULVAC SRH-420 is operated via an on-board graphical user interface, which allows the user to carry out various processes such as pumpdown, sputter cleaning, substrate loading/unloading, and substrate monitoring. It also has the capability to store recipes as well as generating detailed process reports along with real-time process data. It is compatible with a variety of process gases such as hydrogen, argon, nitrogen, oxygen and other inert gases. SRH-420 sputtering model is designed to provide the highest quality thin films, which can be utilized for a variety of industries such as flat panel displays, semiconductor devices, MEMS and other thin film technologies. The equipment is highly versatile and user-friendly, making it an ideal choice for companies looking for a reliable and cost-effective solution for thin film deposition.