Used ULVAC SRH-420 #9381707 for sale

Manufacturer
ULVAC
Model
SRH-420
ID: 9381707
Sputtering system.
ULVAC SRH-420 is a single-chamber sputtering equipment ideal for a broad range of applications. It uses ready-to-use components in its standard configuration, such as a high power 4-magnetron RF source with a maximum RF power of 5000 Watts and a load lock chamber with a maximum substrate size of 16 inches. SRH-420 has a Graphite load lock chamber, an ion source to enhance film adhesion processes, and a software-based process controller for easy setup and operation. The system also comes with a choice of base substrates, such as silicon, glass, quartz, and various ceramics. This provides versatility and great coverage in a variety of vacuum sputtering applications. ULVAC SRH-420 offers a highly efficient sputtering process where particle densities are kept at an optimal level. The unit employs a unique gas control module for precise process control. ULVAC gas module is designed to be easily operable with an accurate and reliable Control Panel. It offers "on-the-fly" gas control. SRH-420 also offers a wide range of sputtering targets, including aluminum, tungsten, and titanium nitride. All of these targets can be reactively sputtered for process refinement. To ensure reliable and consistent results, ULVAC SRH-420 also includes a multi-gas control machine, temperature control module, vacuum pumps, and a water cooling tool. This provides ample process security even in fluctuating operating conditions. A variety of diagnostics maintain closed-loop process control. SRH-420 is a state-of-the-art sputtering asset, uniquely designed to meet the high demands of many industries, applications, and processes. Overall, ULVAC SRH-420 Sputtering Model is a highly efficient and reliable tool for achieving the best possible film deposits for many applications. Its high-power 4-magnetron RF source is capable of delivering power up to 5000 Watts for improved sputtering process times. It offers a wide range of sputtering targets for highly reactive sputtering, and has multiple gas control, temperature control, and water cooling modules to maintain process security. Finally, SRH-420 has intuitive software-based features and a Control Panel that allows for easy setup and operation.
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