Used ULVAC SRH-530 #9409839 for sale

ULVAC SRH-530 is a sputtering equipment designed and manufactured by ULVAC Corporation. The system is mainly used for films production applications and utilizes a high vacuum magnetron sputtering process. The sputtering unit is composed of a vacuum chamber and a set of mechanisms for transporting and supplying the materials for the deposition of films. The vacuum chamber is designed to operate under pressure ranging from 10-2 to 10-6 Pa. It is equipped with a rotary pump, a turbo molecular pump and a turbo molecular booster pump. The machine also includes an RF power supply, an RF matching network, an RF plasma source, a sputtering target and a shuttle mechanism. SRH-530 provides a well-controlled magnetron sputtered film deposition process. The RF power supply used in the tool provides stable DC voltage and current to the target. The RF matching network and the plasma source generate the plasma to sputter the target material. The shuttle mechanism assists in the transferring of the target into the asset and the alignment of the target to the substrate. Also, the model provides a contamination-free environment for the film deposition process. The equipment offers a high accuracy in controlling the sputtering process parameters such as RF power level, gas flow rate and substrate temperature. The gas flow rate is mainly regulated by a mass-flow controller. The substrate temperature can be controlled using a temperature controller. The system also features a powerful software for data management and process control. ULVAC SRH-530 sputtering unit is ideal for producing high performance films such as antireflective coatings, protective coatings, conductive layers and optical films. The machine can be used in several industries including semiconductors, automotive, electronics, and optical. SRH-530 has a compact design and is easy to operate. Its performance and accuracy make it a high quality choice for film deposition applications.