Used ULVAC SRH-820 #293607565 for sale

Manufacturer
ULVAC
Model
SRH-820
ID: 293607565
Sputtering system DC High voltage Gas: Ar Gas dissociation Ions hit target Target backsputter deposited on Wafer Chambers: Load lock Transfer Heat Etch (2) TiW Vacuum: Load lock chamber: Dry pump H2 / Transfer chamber: Dry pump + cryo pump Etch chamber: Dry pump + turbo pump TiW / Au Chamber: Dry pump + turbo pump.
ULVAC SRH-820 is a high-level, high-performance sputtering equipment designed for a wide range of depositing applications. It incorporates the latest in sputtering technologies to provide superior coating uniformity, reproducibility and throughput. This system is ideal for reactive sputtering and is capable of producing a variety of film types including oxides, nitrides, amorphous and crystalline structures. ULVAC SRH 820 utilizes an advanced magnetron sputtering unit and a unique anode configuration for maximum ion bombardment of the substrate. This provides excellent adhesion and minimal adhesion failures. In addition, the machine features a range of process variables including current, pressure and flow rate to ensure the highest quality film formation. One of the most distinctive features of SRH-820 is the Dual Target Technology. This allows two targets to be housed in one single chamber, with individual power and control. Each target is independently operated and monitored, providing excellent uniformity, even over large substrates. The independent targets can be independently sputtered at different rates to achieve a variety of film and thickness requirements. SRH 820 also features cooling for high-power and complex process applications. The choice of a closed-loop cooling tool or an air-cooled asset is available. The closed-loop cooling model provides excellent heat dissipation ensuring uniform deposition on any substrate. ULVAC SRH-820 is designed as an open architecture and is suitable for use with a range of compatible process gases, including oxygen, nitrogen and argon. Process stability is also ensured by PLC-controlled safety logic, ensuring the highest quality deposition with minimal risk of damage to substrates or the equipment. ULVAC SRH 820 is highly versatile with the ability to expand to include a wide range of target materials, process gasses and substrates. It is quickly becoming the go-to choice in the advanced coating industry for its robust performance and high-level quality finishes.
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