Used ULVAC SRH-820 #9398866 for sale

ULVAC SRH-820 is a sputtering equipment designed to deposit metal and dielectric thin films. It features direct resistive magnetron sputtering, which allows for precision control of sputter rates and film thickness uniformity for increased performance and reliability. ULVAC SRH 820's working chamber is equipped with a unique film formation mechanism—Dual Now Vacuum Field Control (Denfield)—which combines an electrostatic shield along with a powerful magnetron source to attain stable process control and high-quality films. The system can also be customized for various applications, featuring control hardware, software, materials, and components to optimize the surface and film structure of the finished product. SRH-820's design includes a high-precision, low-energy RF magnetron source to enable large-area sputter deposition with good uniformity. This design allows for good film uniformity and excellent particle control, which contributes to increased process stability, improved device reliability, and a lower cost of ownership. The dual vacuum design also permits process flexibility as well as higher deposition rates. Furthermore, the RF magnetron, DC/RF magnetron, and all sputtering components are designed to accommodate high power up to 110kW, enabling depositions with varying speeds, qualities, and film structures. SRH 820's compatibility with one of the most widely adopted PC-controlled interfaces, a Windows-based software, makes programming and controlling the unit easier. The intuitive interface also allows users to quickly access previous data and quickly set up multiple applications for various procedural requirements. Furthermore, a built-in recording machine provides detailed documentation for further analysis. To ensure optimal performance and operation, ULVAC SRH-820 features several safety features, including an emergency power switch, pressure/vacuum indicator, and an automatic particle monitor, among others. The improved sputtering ability and optional in-situ diagnostics capabilities of ULVAC SRH 820 provide additional advantages over other systems. In conclusion, SRH-820 is a sophisticated sputtering tool designed to provide precise control over both sputter deposition and the film formation of thin films. Its Dual Now Vacuum Field Control, multiple sputtering sources, wide material compatibility, and built-in safety features make it a powerful choice for high-precision and high-quality applications.