Used ULVAC Zi-1000 #9157922 for sale

ULVAC Zi-1000 is a sputtering equipment based on ULVAC patented advanced low vacuum arc (ALVA) technique. It provides superior sputtering uniformity and deposition rate control over wide working pressure range. The system consists of a main chamber, an RF power supply, an ALVA electron gun, three rotatable targets, a shroud, and a vacuum pump. The main chamber is equipped with four ports for three rotatable targets and one for the electron gun. The RF power supply is capable of providing up to 1000 Watts of power and can be controlled precisely. The ALVA electron gun has an electron gun power supply and control board, and a set of electron guns for both linear and circular motion. It is designed to reduce deposition non-uniformities. The three rotatable targets are made of tungsten and have a thickness of 5mm, and are capable of handling temperatures up to 1000°C. They have an outer diameter of 300mm. The shroud is made of aluminum and is used to contain the plasma during deposition process and reduce contamination. The vacuum pump is capable of achieving low working pressures and has a flow rate of 500 liters per minute. The unit includes various accessories such as dust filter, vacuum valves, pressure gauges, etc. Zi-1000 enables optimal surface finish, exceptional adhesion and low surface roughness, as well as excellent topography control. It is perfect for coating hard, conductive surfaces such as steel, copper and aluminum. The machine offers advanced features such as high deposition rate for thick films, precise control of surface topography through multiple targets, hard vacuum for corrosive targets, low substrate temperature for precision deposition, long running time, high power efficiency, and low waste and emissions. In conclusion, ULVAC Zi-1000 is an advanced sputtering tool that provides excellent performance in coating a variety of surfaces.