Used UNAXIS / BALZERS BPS LLS EVO #9240950 for sale
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UNAXIS / BALZERS BPS LLS EVO is a state-of-the-art sputtering equipment designed for the deposition of thin films over large areas. The system's primary components include an advanced magnetron gun with variable angle and variable pulse length, as well as a deposition chamber with rotational substrate holder to facilitate uniform deposition and emit uniform energy distribution onto a wide variety of substrate materials. The magnetron gun of UNAXIS BPS LLS EVO sputtering unit is designed to provide accurate and uniform film deposition selectively anywhere on large substrates, including rectangular (JEDEC) and complex geometries with up to 5,000 mm2 area. It is equipped with a wide range of parameters and features that allow for precise application of high quality metallic and dielectric films, such as refractory metals, alloys, oxides, nitrides, diamond-like carbon, and resists. Additionally, the machine is capable of depositing optionally textured structural layers to improve adhesion of film layers during organic or inorganic deposition on wafer carriers. BALZERS BPS LLS EVO sputtering tool has a load lock asset for operating on a clean-room environment and is also equipped with a robot arm that can quickly exchange substrates between process chambers, allowing for efficient batch processing of large numbers of miniature components. This model also offers a high deposition rate of up to 10 nm/min, making it suitable for use in a variety of applications, such as thin film deposition on flat panel display, semiconductor chips, and high-precision micro-electronic components. Moreover, BPS LLS EVO sputtering equipment also features advanced control and monitoring system to ensure repeatable processes and fast response time. Its advanced feedback control unit allows the operators to monitor and control the deposition parameters in real time, providing a consistent and reliable film coating over large area substrates. Its customizable parameters also simplify the setup process while reducing the need for frequent intervention from the user. In summary, UNAXIS / BALZERS BPS LLS EVO sputtering machine is an advanced tool for thin film deposition. Its advanced features deliver high-quality films with uniform energy distribution, while its advanced control tool ensures repeatability and fast response times. In addition, its load-lock asset and robot arm also allow for efficient batch processing of large numbers of components. As such, UNAXIS BPS LLS EVO sputtering model is the perfect choice for a variety of applications requiring fast, accurate, and uniform film deposition.
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