Used UNAXIS / BALZERS LLS EVO #9167779 for sale

UNAXIS / BALZERS LLS EVO is a hybrid sputtering equipment, characterized by a non-inductively coupled linear magnetron arrangement for producing thin films, which combines the benefits of high d.c. and low frequency a.c. sputtering techniques. The system also offers in situ metrology measurements to assess the quality of the deposition. The unit has two main components, a large linear magnetron unit and a smaller linear magnetron power supply. The linear magnetron power supply allows the generation of a highly homogeneous and uniform d.c. sputter field within the magnetron chamber. Additionally, a high power low frequency a.c. pulse is injected into the power supply to promote increasing ionization and materials mobility in the plasma. This arrangement allows for higher deposition rates while maintaining good homogeneity and uniformity. The linear magnetron unit is equipped with 6 sputter sources, each with variable input power, along with 4 rotating inline targets. The machine is designed with clearances between targets to facilitate film targets change. Furthermore, the magnetron chamber is constructed from stainless steel to ensure a reliable vacuum environment. Additionally, the linear magnetron working chamber is connected to additional ports to allow for in situ optical monitoring capabilities. UNAXIS LLS EVO is designed to guarantee the highest uniformity over large substrates and to minimize particle and debris issues during the deposition process. Its efficient operating conditions enhance the etch-to-deposition ratio for better process yield. The tool is also equipped with advanced onboard process control monitoring, enabling accurate sputtering performance and a reliable deposition environment. Additionally, the asset allows for intricate analysis and optimization of technologies, such as oxide annealing and deposition cycles. Overall, BALZERS LLS EVO sputtering model offers a powerful, reliable, and efficient solution for thin-film deposition and optoelectronics research.